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Optical Engineering

Surface profilometry by a parallel-mode confocal microscope
Author(s): Radim Chmelik; Zdenek Harna
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Paper Details

Date Published: 1 April 2002
PDF: 2 pages
Opt. Eng. 41(4) doi: 10.1117/1.1461832
Published in: Optical Engineering Volume 41, Issue 4
Show Author Affiliations
Radim Chmelik, Brno Univ. of Technology (Czech Republic)
Zdenek Harna, Brno Univ. of Technology (Czech Republic)


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