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Optical Engineering

Diffraction image in an optical microscope: application to detection of birefringence
Author(s): Bing Zhao; Zhengyuan Cao; Ruhua Fang; Anand Krishna Asundi
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Paper Abstract

A new method for weak birefringence inspection is proposed. Based on the models of Kubota and Inoue and Hansen and Conchello, the formulation of the diffracted pattern of a point source transmitting through a sample with weak birefringence is carried out. An optical polarizing microscope is used to measure the retardation and the optic axis of the sample. The condenser of microscope is replaced by a 100X/1.25 numerical aperture (NA) objective to increase the birefringence measurement sensitivity. This method is suitable for both visual and quantitative detection of weak birefringence. Tests on plastic films and CD substrates are conducted.

Paper Details

Date Published: 1 April 2002
PDF: 9 pages
Opt. Eng. 41(4) doi: 10.1117/1.1458550
Published in: Optical Engineering Volume 41, Issue 4
Show Author Affiliations
Bing Zhao, Pratt & Whitney (United States)
Zhengyuan Cao, Tongji Univ. (China)
Ruhua Fang, Tongji Univ. (China)
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)

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