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Journal of Micro/Nanolithography, MEMS, and MOEMS

Design and characterization of two-axis rotational micromirrors using multi-user MEMS processes
Author(s): Julianna E. Lin; Vikas Sharma; Feras S. J. Michael; Andrew G. Kirk
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Paper Abstract

The design and characterization of a two-axis rotational micromirror is explored. The mirrors were fabricated using a commercial microelectromechanical system (MEMS) foundry service, known as the multi-user MEMS processes (MUMPs) foundry service. The prototypes were then characterized using a phase-shifting Mirau interferometer. From these results, it was shown that the MUMPs process can be used to create satisfactory designs for rotational micromirrors with tilt angles in the range of 0-23 mrad and control voltages in the range of 0-30 V. In addition, the behavior of these mirrors was shown to fall within 5% of the values predicted by the theoretical models for the devices.

Paper Details

Date Published: 1 April 2002
PDF: 9 pages
J. Micro/Nanolith. 1(1) doi: 10.1117/1.1445799
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 1, Issue 1
Show Author Affiliations
Julianna E. Lin, McGill Univ. (Canada)
Vikas Sharma, McGill Univ. (Canada)
Feras S. J. Michael, Xanoptix Inc. (United States)
Andrew G. Kirk, McGill Univ. (Canada)


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