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Optical Engineering

Peak movement detection method of an equally-spaced fringe for precise position measurement
Author(s): Jong Hoon Yi; Soo Hyun Kim; Yoon Keun Kwak; Yun Woo Lee
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Paper Abstract

We present a new signal processing method, extracting the phase information from the spatial interference pattern, for precise displacement measurement. This method is to measure the fringe movement by detecting the fringe peak positions, which are linearly proportional to the displacement of an object. The proposed method is simple and robust compared to conventional techniques, but it has several significant error sources: the optical and electrical random noises, the wavefront distortion, and the tilt motion of the target mirror. Thus, we need the error analyses and computer simulations about the effect of these factors and propose the compensation method.

Paper Details

Date Published: 1 February 2002
PDF: 7 pages
Opt. Eng. 41(2) doi: 10.1117/1.1431253
Published in: Optical Engineering Volume 41, Issue 2
Show Author Affiliations
Jong Hoon Yi, Korea Advanced Institute of Science and Technology (South Korea)
Soo Hyun Kim, Korea Advanced Institute of Science and Technology (South Korea)
Yoon Keun Kwak, Korea Advanced Institute of Science and Technology (South Korea)
Yun Woo Lee, Korea Research Institute of Standards and Science (South Korea)


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