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Optical Engineering

Stitching interferometric measurement data for inspection of large optical components
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Paper Abstract

An algorithm for stitching together a set of individual phase measurements into a unified larger phase map is presented. The set of individual phase maps results from scanning a component over the interferometer aperture and acquiring a measurement at each position. The algorithm is based on an iterative approach, where singular value decomposition is used to solve the rigid body movement problem between the different phase maps. The algorithm has been tested in numerical experiments and has been successfully applied to real data.

Paper Details

Date Published: 1 February 2002
PDF: 6 pages
Opt. Eng. 41(2) doi: 10.1117/1.1430727
Published in: Optical Engineering Volume 41, Issue 2
Show Author Affiliations
Mikael Sjoedahl, CSIRO (Sweden)
Bozenko F. Oreb, CSIRO (Australia)

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