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Optical Engineering

Submicron holes in copper thin film directly ablated using femtosecond pulsed laser
Author(s): B. K. A. Ngoi; Krishnan Venkatakrishnan; Beng Heok Tan
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Paper Abstract

The ability to machine very small features in material has a wide range of applications in semiconductor microelectronics, such as laser dye etching of ICs. Femtosecond-pulse laser pulses have been shown to hold great potential for high-precision micromachining. The extremely short duration of a femtosecond pulse highly limits heat diffusion, resulting in clean and defect-free ablation, making highprecision micromachining achievable.

Paper Details

Date Published: 1 December 2001
PDF: 2 pages
Opt. Eng. 40(12) doi: 10.1117/1.1419024
Published in: Optical Engineering Volume 40, Issue 12
Show Author Affiliations
B. K. A. Ngoi, Nanyang Technological Univ. (Singapore)
Krishnan Venkatakrishnan, Nanyang Technological Univ. (Singapore)
Beng Heok Tan, Nanyang Technological Univ. (Singapore)


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