Share Email Print
cover

Optical Engineering

Application of sensitivity analysis for the design of six-degree-of-freedom measurement system
Author(s): Jong-Ahn Kim; Eui Won Bae; Soo Hyun Kim; Yoon Keun Kwak
Format Member Price Non-Member Price
PDF $20.00 $25.00

Paper Abstract

We present a sensitivity analysis and performance evaluation of a six-degree-of-freedom measurement system that uses a diffraction grating as a cooperative target. To design the measurement system, we require a theoretical analysis of performance, such as sensitivity of each sensing direction. The intensity distributions of the diffracted beams are calculated with the scalar diffraction theory and sensitivity of the measurement system is analyzed against the variations of design parameter values. Using the results of sensitivity analysis, we design the measurement system and evaluate its performance with resolution, measurement error, and crosstalk. The resolution is less than 0.2 ?m in translation and 0.5 arcsec in rotation. In experiments, measurement error and crosstalk between sensing channels are within ±0.5 ?m in translation and ±2 arcsec in rotation.

Paper Details

Date Published: 1 December 2001
PDF: 8 pages
Opt. Eng. 40(12) doi: 10.1117/1.1418714
Published in: Optical Engineering Volume 40, Issue 12
Show Author Affiliations
Jong-Ahn Kim, Korea Advanced Institute of Science and Technology (South Korea)
Eui Won Bae, Korea Advanced Institute of Science and Technology (South Korea)
Soo Hyun Kim, Korea Advanced Institute of Science and Technology (South Korea)
Yoon Keun Kwak, Korea Advanced Institute of Science and Technology (South Korea)


© SPIE. Terms of Use
Back to Top