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Optical Engineering

Linearized inversion of scatterometric data to obtain surface profile information
Author(s): Emmanuel M. Drege; Jeffrey A. Reed; Dale M. Byrne
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Paper Details

Date Published: 1 January 2002
PDF: 12 pages
Opt. Eng. 41(1) doi: 10.1117/1.1416850
Published in: Optical Engineering Volume 41, Issue 1
Show Author Affiliations
Emmanuel M. Drege, JDS Uniphase and Univ. of Texas/Dallas (United States)
Jeffrey A. Reed, University of Texas at Dallas (United States)
Dale M. Byrne, Univ. of Texas/Dallas (United States)

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