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Optical Engineering

On optical properties of two photoresists designed for charge-coupled device microlenses
Author(s): Nina Nordman; Olli Nordman
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Paper Details

Date Published: 1 November 2001
PDF: 5 pages
Opt. Eng. 40(11) doi: 10.1117/1.1411976
Published in: Optical Engineering Volume 40, Issue 11
Show Author Affiliations
Nina Nordman, Veeco, Metrology Group (United States)
Olli Nordman, Optical Sciences Ctr./Univ. of Arizona (United States)


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