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Optical Engineering

Noncontact probe for profilometric measurement of small-form parts
Author(s): Ming Chang; Kao-Hui Lin
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Paper Abstract

A low-cost and efficient probe for noncontact pro- filometric measurement of small-form parts is proposed. This measurement principle is based on the well-known projection fringe method. The fringe projection system consists of a laser diode light source and a simple lateral shearing interferometry mechanism. The measurement range can be flexibly adjusted to fit the size of the specimen. Experiments are implemented in the inspection of a ball grid array (BGA) substrate. Experimental results show that the measurement accuracy is in the micrometer region and repeatability in the submicrometer region. This provides the possibility for this system to be applied to 3-D profile measurement of a specimen of the order of a millimeter or smaller.

Paper Details

Date Published: 1 October 2001
PDF: 2 pages
Opt. Eng. 40(10) doi: 10.1117/1.1405416
Published in: Optical Engineering Volume 40, Issue 10
Show Author Affiliations
Ming Chang, Chung Yuan Christian Univ. (Taiwan)
Kao-Hui Lin, Chung Yuan Christian Univ. (Taiwan)

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