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Optical Engineering

Effective exposure dose measurement technologies: multitone flood exposure by unresolved gratings with multilevel opening ratio
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Paper Details

Date Published: 1 October 2001
PDF: 7 pages
Opt. Eng. 40(10) doi: 10.1117/1.1403737
Published in: Optical Engineering Volume 40, Issue 10
Show Author Affiliations
Soichi Inoue, Toshiba Corp. (Japan)
Tadahito Fujisawa, Toshiba Corp. (Japan)
Kyoko Izuha, Toshiba Corp. (Japan)


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