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Optical Engineering

Profilometer for measuring superfine surfaces
Author(s): Zhaofei Zhou; Weidong Zhou; Wenjie Li
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Paper Abstract

An interference profilometer for measuring the microprofile of superfine surfaces is described. It has a stabilized He-Ne laser light source with two longitudinal modes and two coaxial interference arms. The measuring arm is focused on the sample surface to form a small spot while the reference arm forms a large spot. As a result, the reference arm provides a constant signal and only the measuring arm will be sensitive to the irregularity of the microprofile. Mechanical vibration has a very small effect on the instrument performance. Even if vibration amplitudes reach 300 nm, the measurement noise is less than 1 nm. The instrument has a vertical resolution better than 0.2 Å root mean square (rms) and smallest form error among existing coaxial profilometers. It is well suited for measuring the microstructure on photoetched surfaces.

Paper Details

Date Published: 1 August 2001
PDF: 7 pages
Opt. Eng. 40(8) doi: 10.1117/1.1387994
Published in: Optical Engineering Volume 40, Issue 8
Show Author Affiliations
Zhaofei Zhou, Sichuan Univ. (China)
Weidong Zhou, Sichuan University (China)
Wenjie Li, Sichuan Univ. (China)

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