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Optical Engineering

Profilometer for measuring superfine surfaces
Author(s): Zhaofei Zhou; Weidong Zhou; Wenjie Li
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Paper Details

Date Published: 1 August 2001
PDF: 7 pages
Opt. Eng. 40(8) doi: 10.1117/1.1387994
Published in: Optical Engineering Volume 40, Issue 8
Show Author Affiliations
Zhaofei Zhou, Sichuan Univ. (China)
Weidong Zhou, Sichuan University (China)
Wenjie Li, Sichuan Univ. (China)

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