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Optical Engineering

Micro-optical distance sensor fabrication by deep x-ray lithography
Author(s): Hajime Nakajima; Patrick Ruther; Juergen Mohr; Masahiro Tsugai; Teruo Usami
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Paper Details

Date Published: 1 August 2001
PDF: 7 pages
Opt. Eng. 40(8) doi: 10.1117/1.1387987
Published in: Optical Engineering Volume 40, Issue 8
Show Author Affiliations
Hajime Nakajima
Patrick Ruther, Forschungszentrum Karlsruhe (Germany)
Juergen Mohr, Forschungszentrum Karlsruhe GmbH (Germany)
Masahiro Tsugai, Mitsubishi Electric Corp. (Japan)
Teruo Usami, Mitsubishi Electric Corp. (Japan)


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