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Optical Engineering

Nanotribology of thin films in lithium niobate optical waveguide modulator LiNbO3-Ti(20 nm)-Pt(10 nm)-Au(100 nm)-Au(10 um) using depth-sensing nanoindentation and scratching techniques
Author(s): Lotfi Chouanine
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Paper Details

Date Published: 1 August 2001
PDF: 8 pages
Opt. Eng. 40(8) doi: 10.1117/1.1387986
Published in: Optical Engineering Volume 40, Issue 8
Show Author Affiliations
Lotfi Chouanine, NGK Insulators, Ltd. (Japan)

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