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Optical Engineering

Optical profilometer based on the principle of differential interference
Author(s): Qingxiang Li; Hong Gao; Shifu Xue; Yuhe Li
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Paper Details

Date Published: 1 May 2001
PDF: 4 pages
Opt. Eng. 40(5) doi: 10.1117/1.1359794
Published in: Optical Engineering Volume 40, Issue 5
Show Author Affiliations
Qingxiang Li, Tsinghua Univ. (China)
Hong Gao, Tsinghua Univ. (China)
Shifu Xue, Tsinghua Univ. (China)
Yuhe Li, Tsinghua Univ. (China)

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