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Optical Engineering

High-sensitivity surface-profile measurements by heterodyne white-light interferometer
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Paper Details

Date Published: 1 March 2001
PDF: 5 pages
Opt. Eng. 40(3) doi: 10.1117/1.1349216
Published in: Optical Engineering Volume 40, Issue 3
Show Author Affiliations
Akiko Hirai, National Research Lab. of Metrology (Japan)
Hirokazu Matsumoto, National Research Lab. of Metrology (Japan)


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