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Optical Engineering

Subnanometer digital positioning of large bodies by Fabry-Perot interferometry
Author(s): Fabrizio Bertinetto; Enrico Canuto
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Paper Details

Date Published: 1 January 2001
PDF: 5 pages
Opt. Eng. 40(1) doi: 10.1117/1.1332773
Published in: Optical Engineering Volume 40, Issue 1
Show Author Affiliations
Fabrizio Bertinetto, IMGC - Istituto di Metrologia G. Colonnetti (Italy)
Enrico Canuto, Politecnico di Torino (Italy)


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