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Optical Engineering

Through-wafer optical probe characterization for microelectromechanical systems positional state monitoring and feedback control
Author(s): Jeremy M. Dawson; Jingdong Chen; Kolin S. Brown; Parviz F. Famouri; Lawrence Anthony Hornak
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Paper Details

Date Published: 1 December 2000
PDF: 8 pages
Opt. Eng. 39(12) doi: 10.1117/1.1327177
Published in: Optical Engineering Volume 39, Issue 12
Show Author Affiliations
Jeremy M. Dawson, West Virginia Univ. (United States)
Jingdong Chen, West Virginia Univ. (United States)
Kolin S. Brown, West Virginia Univ. (United States)
Parviz F. Famouri, West Virginia Univ. (United States)
Lawrence Anthony Hornak, West Virginia Univ. (United States)


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