Optical EngineeringScanning laser vibrometer for dynamic study of small features
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The laser Doppler vibrometer (LVD) has been the favorite instrument for precision dynamics measurement due to its noncontact nature, high accuracy, and high resolution. However, LDV can give only the dynamic data of a particular locate on the entire feature. To acquire the whole field data, a laser beam scanning mechanism must be implemented. Currently, a motor-driven scanning mirror is used to move the measurement probe from one point to another, and the mechanical vibrations of the scanning mirror reduce the measurement accuracy. We introduce a novel scanning LDV optical system embodying an acoustooptic deflector scanning mechanism, which can improve the measurement accuracy since there is no mechanical motion involved. One main advantage of this system is that it generates laser scanning in parallel, which is different from the beam scanning in a conventional scanning LDV. Promising results are obtained from the preliminary experiments carried out for measurement of a hard disk suspension.