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Optical Engineering

0.13mm photolithography using inverse Fourier transform convolution filtering
Author(s): Chongxi Zhou; Xiangang Luo; Feng Boru
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Paper Details

Date Published: 1 November 2000
PDF: 4 pages
Opt. Eng. 39(11) doi: 10.1117/1.1308172
Published in: Optical Engineering Volume 39, Issue 11
Show Author Affiliations
Chongxi Zhou, Institute of Optics and Electronics (China)
Xiangang Luo, Institute of Optics and Electronics (China)
Feng Boru, Institute of Optics and Electronics (China)


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