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Optical Engineering

Real-time measurement of spindle thermal deformation using interferometers
Author(s): Deqiang Song; LiJiang Zeng; Chunyong Yin
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Paper Details

Date Published: 1 August 2000
PDF: 5 pages
Opt. Eng. 39(8) doi: 10.1117/1.1305458
Published in: Optical Engineering Volume 39, Issue 8
Show Author Affiliations
Deqiang Song, Tsinghua Univ. (China)
LiJiang Zeng, Tsinghua Univ. (China)
Chunyong Yin, Tsinghua Univ. (China)

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