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Optical Engineering

Self-calibration of a scanning white light interference microscope
Author(s): Satoshi Kiyono; Wei Gao; Shizhou Zhang; Toru Aramaki
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Paper Details

Date Published: 1 October 2000
PDF: 6 pages
Opt. Eng. 39(10) doi: 10.1117/1.1290471
Published in: Optical Engineering Volume 39, Issue 10
Show Author Affiliations
Satoshi Kiyono, Tohoku Univ. (Japan)
Wei Gao, Tohoku Univ. (Japan)
Shizhou Zhang, Tohoku Univ (Japan)
Toru Aramaki, Tohoku Univ (Japan)


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