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Optical Engineering

Radial shearing interferometer for in-process measurement of diamond turning
Author(s): Tsuguo Kohno; Daiji Matsumoto; Takanori Yazawa; Yutaka Uda
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Paper Details

Date Published: 1 October 2000
PDF: 4 pages
Opt. Eng. 39(10) doi: 10.1117/1.1290463
Published in: Optical Engineering Volume 39, Issue 10
Show Author Affiliations
Tsuguo Kohno, Tokyo Metropolitan Inst of Tech (Japan)
Daiji Matsumoto, Nikon Co (Japan)
Takanori Yazawa, Tokyo Metropolitan Institute of Technology (Japan)
Yutaka Uda, Nikon Corp. (Japan)


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