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Spie Press Book

Field Guide to Optical Lithography
Author(s): Chris A. Mack
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Book Description

This Field Guide distills the material written by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. It details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.

Book Details

Date Published: 24 January 2006
Pages: 136
ISBN: 9780819462077
Volume: FG06

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