Spie Press BookHandbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
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The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
Date Published: 14 March 1997
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