The Moscone Center
San Francisco, California, United States
1 - 6 February 2014
Plenary Events
MOEMS-MEMS Plenary Session
Date: Monday 3 February 2014
Time: 9:00 AM - 12:00 PM
Session Chairs: David L. Dickensheets, Montana State Univ. (United States); Holger Becker, microfluidic ChipShop GmbH (Germany)

9:00 am: Welcome and Announcement of MOEMS-MEMS Best Paper Award and Best Student Paper Award
David L. Dickensheets, Montana State Univ. (United States); Holger Becker, microfluidic ChipShop GmbH (Germany)

9:15 am: Electrostatic Nano Electromechanical Switches (NEMS) for Energy-Efficient Digital Systems

Roger T. Howe, Stanford Univ. (United States)

Micro- and nano-fabricated sensors and actuators have become commonplace in recent years and have transformed the interfaces between the physical world and the Internet. Nano electromechanical switches (NEMS), by contrast, are intended for augmenting the performance of digital systems at the core of information technology. This talk will summarize recent research in NEMS, with a focus on designs using electrostatic actuation. At Stanford, we have developed processes for fabricating lateral (in-plane) electrostatically actuated multi-terminal switches above CMOS. Given the performance characteristics of NEMS, we identified a promising system application—implementing the programmable routing in field-programmable gate arrays (FPGAs). I will review the fabrication challenges, contact phenomena, and scaling of lateral NEMS, as well as their micro-encapsulation and potential applications in sensing systems.

Roger T. Howe is the William E. Ayer Professor in Engineering at Stanford University. He received the B.S. degree in physics from Harvey Mudd College and the M.S. and Ph.D. in electrical engineering from the University of California, Berkeley in 1981 and 1984. After faculty positions at CMU and MIT from 1984-1987 and Berkeley from 1987-2005, he joined Stanford’s Electrical Engineering Department. His research interests include nano/micro electromechanical system design and fabrication technologies, with applications in energy conversion and biomolecular sensing. He is the Faculty Director of the Stanford Nanofabrication Facility (SNF).

Coffee Break 10:00 to 10:30 am

10:30 am: Tailoring Light for Optically-Guided Nano- and Microassembly: From Bio-Hybrid Robots to Droplet Cages

Cornelia Denz, Westfälische Wilhelms-Univ. Münster (Germany)

With the utilization of holographic beam shaping techniques in optical tweezers, complex trapping configurations based on tailored light fields have been realized to overcome current challenges in applications in fluidic and biomedical systems. Holographically generated higher-order light modes, for example, can induce highly structured and ordered three-dimensional optical potential landscapes allowing optically-guided assembly of nanocontainers or bio-hybrid nano robots, and can be used as a tool to explore the inner cell, paving the way to optically-assisted analysis of diseases.
Tailored light fields can also be implemented to induce non-optical forces. Optoelectronic tweezers take advantage of dielectrophoretic forces to trap microstructures in an adaptive and flexible, massively parallel way. Photophoretic trapping makes use of thermal forces and by this means is perfectly suited for trapping absorbing particles in dynamic light cages or to guide droplets. Hence the combination of holographically tailored light fields with complementary dielectrophoretic and photophoretic trapping provides a holistic approach to novel optical nano- and microassembly scenarios of bio-hybrid or fluidic matter.

Cornelia Denz has pioneered linear and nonlinear optical structuring of light for light-matter interaction starting from holographic optical data storage over dynamic nonlinear microscopy up to nonlinear photonic lattices. Recently, she connected complex light-based optical tweezers with biomedical and microfluidic applications. Cornelia received her PhD in physics 1992 from Darmstadt University of Technology, Germany. She received the Lise-Meitner award for the development of components for optical neural networks in 1992, and the Adolf-Messer-Award for the creation of nonlinear dynamic phase contrast microscopy in 1999. Since 2001, she is a professor for nonlinear photonics at Münster University, Germany, leading a group of about 25. Since 2010, she is also a vice rector for international affairs and young researchers at Muenster University. In 2012, she was awarded “teacher of the year” in Natural Sciences in Germany. She has published more than 180 publications, written three books and edited many more. Cornelia is a fellow of the Optical Society of America and the European Optical Society.

11:15 am: Bio-Integrated and Bio-Inspired Optical Microsystems

John A. Rogers, Univ. of Illinois at Urbana-Champaign (United States)

Recent advances in materials and fabrication techniques enable construction of high performance optical microsystems that can flex, bend, fold and stretch, with ability to accommodate large (<<1%) strain deformation, reversibly and in a purely elastic fashion. Such systems open up new engineering opportunities in bio-inspired device design and in intimate, multifunctional interfaces to biology. This talk summarizes two examples: (1) hemispherical digital imagers that incorporate essential design features found in the arthropod eye and (2) injectable, cellular-scale light emitting diodes for wireless control of complex behaviors in animal models, via the techniques of optogenetics.

Professor John A. Rogers obtained BA and BS degrees in chemistry and in physics from the University of Texas, Austin, in 1989. From MIT, he received SM degrees in physics and in chemistry in 1992 and the PhD degree in physical chemistry in 1995. From 1995 to 1997, Rogers was a Junior Fellow in the Harvard University Society of Fellows. He joined Bell Laboratories as a Member of Technical Staff in the Condensed Matter Physics Research Department in 1997, and served as Director of this department from the end of 2000 to 2002. He is currently Swanlund Chair Professor at University of Illinois at Urbana/Champaign, with a primary appointment in the Department of Materials Science and Engineering. He is also Director of the Seitz Materials Research Laboratory. Rogers’ research includes fundamental and applied aspects of materials and patterning techniques for unusual electronic and photonic devices, with an emphasis on bio-integrated and bio-inspired systems. He has published more than 400 papers and is inventor on over 80 patents, more than 50 of which are licensed or in active use. Rogers is a Fellow of the IEEE, APS, MRS and AAAS, and he is a member of the National Academy of Engineering. His research has been recognized with many awards, including a MacArthur Fellowship in 2009, the Lemelson-MIT Prize in 2011 and the MRS Mid-Career Researcher Award in 2013.
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