San Diego Convention Center
San Diego, California, United States
6 - 10 August 2017
Conference 10385
Advances in Metrology for X-Ray and EUV Optics VII
Sunday - Monday 6 - 7 August 2017
Important
Dates
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Abstract Due:
23 January 2017

Author Notification:
3 April 2017

Manuscript Due Date:
10 July 2017

Conference
Committee
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Conference Chairs
Program Committee
  • Simon G. Alcock, Diamond Light Source Ltd. (United Kingdom)
  • Raymond Barrett, European Synchrotron Radiation Facility (France)
  • Daniele Cocco, SLAC National Accelerator Lab. (United States)
  • Uwe Flechsig, Paul Scherrer Institut (Switzerland)
  • Ralf D. Geckeler, Physikalisch-Technische Bundesanstalt (Germany)
  • Kenneth A. Goldberg, Lawrence Berkeley National Lab. (United States)
  • Mikhail V. Gubarev, NASA Marshall Space Flight Ctr. (United States)
  • Christian F. Guertin, Vermont Photonics Technologies Corp. (United States)
  • Mourad Idir, Brookhaven National Lab. (United States)
  • Weiguo Liu, Xi'an Technological Univ. (China)
  • Jonathan Manton, Inprentus, Inc. (United States)
  • Hidekazu Mimura, The Univ. of Tokyo (Japan)
  • Josep Nicolas, CELLS - ALBA (Spain)

Program Committee continued...
Sunday 6 August Show All Abstracts
Session 1:
At-Wavelength Metrology
Sunday 6 August 2017
2:00 PM - 3:20 PM
Single shot Talbot imaging for wavefront sensing and x-ray metrology
Paper 10385-1
Author(s): Walan C. Grizolli, Xianbo Shi, Lahsen Assoufid, Argonne National Lab. (United States)
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High-performance at-wavelength metrology with an efficient high-order suppression system
Paper 10385-2
Author(s): Franz Schäfers, Andrey A. Sokolov, Andreas Gaupp, Martin Luettecke, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
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Speckle-based portable device for in-situ metrology of x-ray mirrors at Diamond Light Source
Paper 10385-3
Author(s): Hongchang Wang, Tunhe Zhou, Yogesh Kashyap, Kawal J. S. Sawhney, Diamond Light Source Ltd. (United Kingdom)
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Investigation of HF-plasma-treated soft x-ray optical elements
Paper 10385-4
Author(s): Frank Eggenstein, Andrey A. Sokolov, Andrei Varykhalov, Maxim Krivenkov, Johannes Wolf, Thomas Zeschke, Franz Schäfers, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
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Session 2:
Metrology of VLS Gratings
Sunday 6 August 2017
3:50 PM - 5:10 PM
Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry
Paper 10385-5
Author(s): Samuel Gleason, Jonathan Manton, Janet Sheung, Taylor Byrum, Cody Jensen, Lingyun Jiang, Inprentus, Inc. (United States); Joseph Dvorak, Ignace Jarrige, Brookhaven National Lab. (United States); Peter M. Abbamonte, Inprentus, Inc. (United States)
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Development of an interferometric microscopy stitching technique for soft x-ray grating metrology
Paper 10385-6
Author(s): Konstantine Kaznatcheev, Brookhaven National Lab. (United States); Junpeng Xue, Sichuan Univ. (China), Brookhaven National Lab. (United States); Bo Gao, Shanghai Institute of Applied Physics (China), Univ. of Chinese Academy of Sciences (China), Brookhaven National Lab. (United States); Lei Huang, Joseph Dvorak, Mourad Idir, Brookhaven National Lab. (United States)
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Characterization of a 150-mm long variable line spacing plane grating through interferometry
Paper 10385-7
Author(s): Maurizio Vannoni, Idoia Freijo-Martín, European XFEL GmbH (Germany)
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Metrology of variable-line-spacing x-ray gratings using the APS Long Trace Profiler
Paper 10385-8
Author(s): Janet Sheung, Argonne National Lab. (United States), Univ. of Illinois (United States); Jun Qian, Argonne National Lab. (United States); Muriel Thomasset, Synchrotron SOLEIL (France); Jonathan Manton, Inprentus, Inc. (United States); Sunil Bean, Argonne National Lab. (United States); Peter Z. Takacs, Joseph Dvorak, Brookhaven National Lab. (United States); Lahsen Assoufid, Argonne National Lab. (United States)
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Session Plen:
Symposium-wide Plenary Session
Sunday 6 August 2017
6:00 PM - 7:30 PM
Monday 7 August Show All Abstracts
Session 3:
Calibration and Nanoradian Metrology
Monday 7 August 2017
9:00 AM - 10:00 AM
Recent developments on nanoradian-angle metrology
Paper 10385-9
Author(s): Tanfer Yandayan, TÜBITAK UME (Turkey)
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A new ultra-high-accuracy angle generator: current status and future direction
Paper 10385-10
Author(s): Christian F. Guertin, Vermont Photonics Technologies Corp. (United States); Ralf D. Geckeler, Physikalisch-Technische Bundesanstalt (Germany)
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A portable device for calibration of autocollimators with nanoradian precision
Paper 10385-11
Author(s): Tanfer Yandayan, TÜBITAK UME (Turkey)
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Session 4:
Metrology Facilities
Monday 7 August 2017
10:30 AM - 11:30 AM
A new optics metrology laboratory at CNPEM: metrology capabilities, performance, and future plans
Paper 10385-12
Author(s): Bernd C. Meyer, Murilo B. da Silva, Harry Westfahl, Ctr. Nacional de Pesquisa em Energia e Materiais (Brazil)
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X-ray optics laboratory at the ALS: current capabilities, new challenges, and tasks for further development
Paper 10385-13
Author(s): Ian Lacey, Lawrence Berkeley National Lab. (United States); Gary P. Centers, Helmholtz-Institut Mainz (Germany), Lawrence Berkeley National Lab. (United States); Gevork S. Gevorkyan, Sergey M. Nikitin, Brian V. Smith, Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)
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Status of the metrology laboratory for the LCLS II project
Paper 10385-14
Author(s): May Ling Ng, Corey L. Hardin, Josep Nicolas, Daniele Cocco, SLAC National Accelerator Lab. (United States)
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Lunch Break 11:50 AM - 1:20 PM
Session 5:
Novel Instruments and Methods
Monday 7 August 2017
1:20 PM - 3:00 PM
New surface slope profiler reaching sub-millimeter spatial resolution
Paper 10385-15
Author(s): Fugui Yang, Ming Li, Ya Du, Quan Cai, Dingxiao Liu, Xiaowei Zhang, Institute of High Energy Physics (China)
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Development of a high-performance surface slope profiler for two-dimensional mapping of x-ray optics
Paper 10385-16
Author(s): Ian Lacey, Lawrence Berkeley National Lab. (United States); Jérôme Adam, Ecole Nationale Supérieure d'Ingenieurs de Caen et Ctr. de Recherche (France); Gary P. Centers, Helmholtz-Institut Mainz (Germany); Gevork S. Gevorkyan, Sergey M. Nikitin, Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)
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Optomechanical development progress of high-accuracy long-trace profiler at the planning HEPS
Paper 10385-17
Author(s): Shanzhi Tang, Ming Li, Institute of High Energy Physics (China)
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Surface slope metrology of highly curved x-ray optics with an interferometric microscope
Paper 10385-18
Author(s): Gevork S. Gevorkyan, Lawrence Berkeley National Lab. (United States); Gary P. Centers, Helmholtz-Institut Mainz (Germany), Lawrence Berkeley National Lab. (United States); Kateryna S. Polonska, Yuriy Fedkovych Chernivtsi National Univ. (Ukraine), Lawrence Berkeley National Lab. (United States); Ian Lacey, Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)
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New twist in the optical schematic of surface-slope measuring long-trace profiler
Paper 10385-19
Author(s): Gevork S. Gevorkyan, Lawrence Berkeley National Lab. (United States); Wayne R. McKinney, Diablo Valley College (United States); Ian Lacey, Sergey M. Nikitin, Lawrence Berkeley National Lab. (United States); Peter Z. Takacs, Brookhaven National Lab. (United States); Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)
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Session 6:
Stitching and Sub-Nanometer Surface Metrology
Monday 7 August 2017
3:30 PM - 4:50 PM
Development of relative angle determinable stitching interferometry for high-accuracy x-ray focusing mirrors
Paper 10385-20
Author(s): Yingna Shi, Xudong Xu, Qiushi Huang, Zhanshan Wang, Tongji Univ. (China)
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Fizeau stitching at the ESRF
Paper 10385-21
Author(s): Amparo Vivo, Raymond Barrett, ESRF - The European Synchrotron (France)
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Three-dimensional shape measurement for x-ray ellipsoidal mirror
Paper 10385-22
Author(s): Takehiro Kume, Yoshinori Takei, Satoru Egawa, Gota Yamaguchi, Hiroto Motoyama, Hidekazu Mimura, The Univ. of Tokyo (Japan)
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Testing Resistive Element Adjustable Length (REAL) cooling for sub-nanometer figure preservation in high-heat load FEL optics
Paper 10385-23
Author(s): Corey L. Hardin, May Ling Ng, Venkat N. Srinivasan, Daniel S. Morton, Peter M. Stefan, Nicholas M. Kelez, Josep Nicolas, Lin Zhang, Daniele Cocco, SLAC National Accelerator Lab. (United States)
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Session PMon:
Posters-Monday
Monday 7 August 2017
5:30 PM - 7:30 PM

Conference attendees are invited to view the posters, enjoy light refreshments, ask questions, and network with colleagues in your field. Authors of poster papers will be present to answer questions concerning their papers. Attendees are required to wear their conference registration badges to the poster sessions. Poster authors, view poster presentation guidelines at http://spie.org/OPPosterGuidelines.
Calibration devices and methods for soft x-ray detector at Beijing Synchrotron Radiation Facility (BSRF)
Paper 10385-24
Author(s): Mingqi Cui, Yidong Zhao, Lei Zheng, Institute of High Energy Physics (China)
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X-ray multilayer mid-frequency characterizations using speckle scanning techniques
Paper 10385-25
Author(s): Hui Jiang, Shanghai Synchrotron Radiation Facility (China)
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Optimization of pencil beam F-Theta lens for high-accuracy metrology
Paper 10385-26
Author(s): Chuanqian Peng, Yumei He, Jie Wang, Shanghai Institute of Applied Physics (China)
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A novel scanning deflectometry based on secondary light source normal tracing method
Paper 10385-27
Author(s): Chuanqian Peng, Yumei He, Jie Wang, Shanghai Institute of Applied Physics (China)
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