San Diego Convention Center
San Diego, California, United States
17 - 21 August 2014
Conference 9206
Advances in Metrology for X-Ray and EUV Optics V
Monday 18 August 2014
Important
Dates
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Abstract Due:
3 February 2014

Author Notification:
14 April 2014

Manuscript Due Date:
23 July 2014

Conference
Committee
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Conference Chairs
Program Committee
  • Simon G. Alcock, Diamond Light Source Ltd. (United Kingdom)
  • Raymond Barrett, European Synchrotron Radiation Facility (France)
  • Daniele Cocco, SLAC National Accelerator Lab. (United States)
  • Leslie L. Deck, Zygo Corporation (United States)
  • Ralf D. Geckeler, Physikalisch-Technische Bundesanstalt (Germany)
  • Kenneth A. Goldberg, Lawrence Berkeley National Lab. (United States)
  • Mikhail V. Gubarev, NASA Marshall Space Flight Ctr. (United States)
  • Mourad Idir, Brookhaven National Lab. (United States)
  • Weiguo Liu, Xi'an Univ. of Technology (China)
  • Hidekazu Mimura, The Univ. of Tokyo (Japan)
  • Josep Nicolas, CELLS - ALBA (Spain)

Program Committee continued...
  • Rajdeep S. Rawat, National Institute of Education (Singapore)
  • Mark D. Roper, Daresbury Lab. (United Kingdom)
  • Kawal J. Sawhney, Diamond Light Source Ltd. (United Kingdom)
  • Frank Siewert, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
  • Regina Soufli, Lawrence Livermore National Lab. (United States)
  • Peter Z. Takacs, Brookhaven National Lab. (United States)
  • Muriel Thomasset, Synchrotron SOLEIL (France)
  • Amparo Vivo, European Synchrotron Radiation Facility (France)
  • Zhanshan Wang, Tongji Univ. (China)
  • Kazuto Yamauchi, Osaka Univ. (Japan)
  • Tanfer Yandayan, TUBITAK UME (Turkey)
  • Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)
  • Brian W. Yates, Canadian Light Source Inc. (Canada)

Monday 18 August Show All Abstracts
Session 1:
Slope Profilers
Monday 18 August 2014
8:30 AM - 10:10 AM
A new optical head tracing reflected light for nanoprofiler
Paper 9206-1
Time: 8:30 AM - 8:50 AM
Author(s): Kohei Okuda, Kenya Okita, Yusuke Tokuta, Takao Kitayama, Motohiro Nakano, Kudo Ryota, Kazuya Yamamura, Katsuyoshi Endo, Osaka Univ. (Japan)
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The developmental long trace profiler (DLTP) optimized for side-facing optics at the ALS
Paper 9206-2
Time: 8:50 AM - 9:10 AM
Author(s): Ian Lacey, Nikolay A. Artemiev, Edward E. Domning, Wayne R. McKinney, Gregory Y. Morrison, Simon A. Morton, Brian V. Smith, Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)
Show Abstract
Upgrade of surface profiler for x-ray mirror at SPring-8
Paper 9206-4
Time: 9:10 AM - 9:30 AM
Author(s): Yasunori Senba, Hikaru Kishimoto, Takanori Miura, Haruhiko Ohashi, Japan Synchrotron Radiation Research Institute (Japan)
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Fabrication method of ellipsoidal mirrors for hard x-ray focusing-precision surface profiler and precision processing machine
Paper 9206-5
Time: 9:30 AM - 9:50 AM
Author(s): Hirokatsu Yumoto, Takahisa Koyama, Japan Synchrotron Radiation Research Institute (Japan), RIKEN (Japan); Satoshi Matsuyama, Kazuto Yamauchi, Osaka Univ. (Japan); Haruhiko Ohashi, Japan Synchrotron Radiation Research Institute (Japan), RIKEN (Japan)
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Design consideration for nano-accuracy long trace profiler at BSRF
Paper 9206-6
Time: 9:50 AM - 10:10 AM
Author(s): Fugui Yang, Ming Li, Institute of High Energy Physics (China)
Show Abstract
Coffee Break 10:10 AM - 10:40 AM
Session 2:
At-wavelength Metrology
Monday 18 August 2014
10:40 AM - 12:00 PM
  • Session Chairs:
  • Mourad Idir, Brookhaven National Lab. (United States);
  • Kenneth A. Goldberg, Lawrence Berkeley National Lab. (United States)
A reflectometer for at-wavelength characterization of XUV-reflection gratings
Paper 9206-7
Time: 10:40 AM - 11:00 AM
Author(s): Frank Eggenstein, Peter Bischoff, Andreas Gaupp, Fred Senf, Andrey Sokolov, Thomas Zeschke, Franz Schäfers, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
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At-wavelength metrology of x-ray optics at Diamond Light Source
Paper 9206-8
Time: 11:00 AM - 11:20 AM
Author(s): Kawal Sawhney, Hongchang Wang, John P. Sutter, Simon G. Alcock, Sebastien Berujon, Diamond Light Source Ltd. (United Kingdom)
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Material and shape properties of the compound refractive lenses
Paper 9206-9
Time: 11:20 AM - 11:40 AM
Author(s): Ivan Lyatun, Alexandr Goikhman, Petr Ershov, Svetlana Medvedeva, Immanuel Kant Baltic Federal Univ. (Russian Federation); Irina I. Snigireva, Anatoly Snigirev, ESRF - The European Synchrotron (France), Immanuel Kant Baltic Federal Univ. (Russian Federation)
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A ptychographic phase retrieval method for measuring figure error profile of soft x-ray focusing mirror
Paper 9206-10
Time: 11:40 AM - 12:00 PM
Author(s): Takahiro Saito, Takehiro Kume, Hiroto Motoyama, Hidekazu Mimura, The Univ. of Tokyo (Japan)
Show Abstract
Lunch Break 12:00 PM - 1:30 PM
Session 3:
Microscopes/Figure Interferometers
Monday 18 August 2014
1:30 PM - 2:50 PM
Development of high-precision figure measurement system for x-ray optics using laser focus microscope
Paper 9206-11
Time: 1:30 PM - 1:50 PM
Author(s): Jangwoo Kim, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi, Osaka Univ. (Japan)
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Stitching measurement of curved x-ray mirror with the new APS slope profiler
Paper 9206-12
Time: 1:50 PM - 2:10 PM
Author(s): Jun Qian, Joseph Sullivan, Lahsen Assoufid, Argonne National Lab. (United States)
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An extreme ultraviolet interferometer suitable to generate dense interference pattern
Paper 9206-13
Time: 2:10 PM - 2:30 PM
Author(s): Karel Kolacek, Jiri Schmidt, Jaroslav Straus, Oleksandr Frolov, Vaclav Prukner, Radek Melich, Institute of Plasma Physics of the ASCR, v.v.i. (Czech Republic)
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Experimental results for absolute cylindrical wavefront testing
Paper 9206-14
Time: 2:30 PM - 2:50 PM
Author(s): Patrick J. Reardon, Ayshah Alatawi, The Univ. of Alabama in Huntsville (United States)
Show Abstract
Coffee Break 2:50 PM - 3:20 PM
Session 4:
Extreme Angle Measurements and Calibration
Monday 18 August 2014
3:20 PM - 4:30 PM
  • Session Chairs:
  • Frank Siewert, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany);
  • Kawal Sawhney, Diamond Light Source Ltd. (United Kingdom)
Pushing the limits: latest developments in angle metrology for the inspection of ultra-precise synchrotron optics (Invited Paper)
Paper 9206-15
Time: 3:20 PM - 3:50 PM
Author(s): Tanfer Yandayan, TÜBITAK UME (Turkey); Ralf D. Geckeler, Physikalisch-Technische Bundesanstalt (Germany); Frank Siewert, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
Show Abstract
Angular calibration of surface slope measuring profilers with a bendable mirror
Paper 9206-16
Time: 3:50 PM - 4:10 PM
Author(s): Nikolay A. Artemiev, Brian V. Smith, Edward E. Domning, Ian Lacey, Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)
Show Abstract
Design of a precision two-dimensional tip-tilting stage system for autocollimator-based long trace profiler angular calibration
Paper 9206-17
Time: 4:10 PM - 4:30 PM
Author(s): Deming Shu, Wenjun Liu, Argonne National Lab. (United States); Steven Kearney, Jayson Anton, Argonne National Lab. (United States), Univ. of Illinois at Chicago (United States); Jun Qian, Joseph Sullivan, Lahsen Assoufid, Argonne National Lab. (United States)
Show Abstract
Session 5:
Facilities
Monday 18 August 2014
4:30 PM - 5:40 PM
A new x-ray optics laboratory (XROL) at the ALS: mission, arrangement, metrology capabilities, performance, and future plans (Invited Paper)
Paper 9206-18
Time: 4:30 PM - 5:00 PM
Author(s): Valeriy V. Yashchuk, Nikolay A. Artemiev, Ian Lacey, Wayne R. McKinney, Howard A. Padmore, Lawrence Berkeley National Lab. (United States)
Show Abstract
An XUV optics beamline at BESSY II
Paper 9206-19
Time: 5:00 PM - 5:20 PM
Author(s): Andrey Sokolov, Frank Eggenstein, Alexei Erko, Silvio Künstner, Matthias Mast, Jan-Simon Schmidt, Fred Senf, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany); Thomas Zeschke, Helmholtz-Zentrum Berlin (Germany); Frank Siewert, Franz Schäfers, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
Show Abstract
Fabrication of OSAKA mirror for synchrotron applications
Paper 9206-20
Time: 5:20 PM - 5:40 PM
Author(s): Akihiko Ueda, Hiromi Okada, Shinya Aono, Shinsaku Shiroma, Takashi Tsumura, JTEC Corp. (Japan)
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