San Diego Convention Center
San Diego, California, United States
28 August - 1 September 2016
Conference 9962
Advances in Metrology for X-Ray and EUV Optics VI
Monday 29 August 2016
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Abstract Due:
8 February 2016

Author Notification:
25 April 2016

Manuscript Due Date:
1 August 2016

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Conference Chairs
Program Committee
  • Simon G. Alcock, Diamond Light Source Ltd. (United Kingdom)
  • Raymond Barrett, European Synchrotron Radiation Facility (France)
  • Daniele Cocco, SLAC National Accelerator Lab. (United States)
  • Ralf D. Geckeler, Physikalisch-Technische Bundesanstalt (Germany)
  • Kenneth A. Goldberg, Lawrence Berkeley National Lab. (United States)
  • Mikhail V. Gubarev, NASA Marshall Space Flight Ctr. (United States)
  • Mourad Idir, Brookhaven National Lab. (United States)
  • Weiguo Liu, Xi'an Univ. of Technology (China)
  • Hidekazu Mimura, The Univ. of Tokyo (Japan)
  • Josep Nicolas, CELLS - ALBA (Spain)
  • Lorenzo Raimondi, Elettra-Sincrotrone Trieste S.C.p.A. (Italy)

Program Committee continued...
Monday 29 August Show All Abstracts
Session 1:
1D and Pencil Beam Profilometry
Monday 29 August 2016
8:40 AM - 10:00 AM
New operational mode of the pencil beam interferometry-based LTP
Paper 9962-1
Author(s): Gary Centers, Brian V. Smith, Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)
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Nanometer accuracy with continuous scans at the ALBA-NOM
Paper 9962-2
Author(s): Josep Nicolas, Pablo Pedreira Conchado, Igors Sics, CELLS - ALBA (Spain); Claudio Ramirez, Juan Campos, Univ. Autònoma de Barcelona (Spain)
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Development of long trace profiler at SPring-8 for evaluation of precise x-ray optics
Paper 9962-3
Author(s): Yasunori Senba, Hikaru Kishimoto, Takanori Miura, Haruhiko Ohashi, Japan Synchrotron Radiation Research Institute (JASRI) (Japan)
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EPICS-based control and data acquisition for the APS slope profiler
Paper 9962-4
Author(s): Joseph Sullivan, Lahsen Assoufid, Jun Qian, Peter R. Jemian, Tim Mooney, Argonne National Lab. (United States); Mark L. Rivers, The Univ. of Chicago (United States); Kurt Goetze, Ronald L. Sluiter, Keenan Lang, Argonne National Lab. (United States)
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Session 2:
2D Profilometry, Interferometry, and Subaperture Stitching
Monday 29 August 2016
10:30 AM - 11:50 AM
Surface profiler for highly-curved nano-focusing mirrors
Paper 9962-5
Author(s): Hirokatsu Yumoto, Takahisa Koyama, Haruhiko Ohashi, Japan Synchrotron Radiation Research Institute (JASRI) (Japan)
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Surface measurements in "grazing incidence" interferometry for long synchrotron mirrors: theoretical limits and practical implementations
Paper 9962-6
Author(s): Maurizio Vannoni, Idoia Freijo Martín, European XFEL GmbH (Germany)
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Sub-aperture stitching interferometry with the reference error reduced for ultra-smooth surfaces
Paper 9962-7
Author(s): Xudong Xu, Zhengxiang Shen, Zhanshan Wang, Tongji Univ. (China)
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Development of metrology for one-meter-long mirrors
Paper 9962-8
Author(s): Shinya Aono, Hiroki Nakamori, Akihiko Ueda, Takashi Tsumra, JTEC Corp. (Japan)
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Lunch Break 11:50 AM - 1:20 PM
Session 3:
Novel Instrumentation and Techniques
Monday 29 August 2016
1:20 PM - 2:20 PM
  • Session Chairs:
  • Mourad Idir, Brookhaven National Lab. (United States) ;
  • Josep Nicolas, CELLS - ALBA (Spain)
The NSLSII optical metrology laboratory
Paper 9962-9
Author(s): Mourad Idir, Lei Huang, Shinan Qian, Konstantine Kaznatcheev, Brookhaven National Lab. (United States)
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Measurement of aspheric mirror by nanoprofiler using normal vector tracing
Paper 9962-10
Author(s): Takao Kitayama, Hiroki Shiraji, Kazuya Yamamura, Katsuyoshi Endo, Osaka Univ. (Japan)
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Development of surface profiler for master mandrel of x-ray ellipsoidal mirror
Paper 9962-11
Author(s): Yoshinori Takei, Hidekazu Mimura, The Univ. of Tokyo (Japan)
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Session 4:
At-Wavelength Metrology
Monday 29 August 2016
2:20 PM - 3:00 PM
  • Session Chairs:
  • Josep Nicolas, CELLS - ALBA (Spain) ;
  • Mourad Idir, Brookhaven National Lab. (United States)
Novel shape measurement method for imaging mirrors using an x-ray grating interferometer
Paper 9962-12
Author(s): Satoshi Matsuyama, Ayumi Kime, Osaka Univ. (Japan); Taro Sakao, Institute of Space and Astronautical Science (Japan); Yoshinori Suematsu, National Astronomical Observatory of Japan (Japan); Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Japan Synchrotron Radiation Research Institute (JASRI) (Japan); Kazuto Yamauchi, Osaka Univ. (Japan)
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Quality control of reflection gratings by use of grazing incidence x-ray fluorescence spectroscopy (GIXRF)
Paper 9962-13
Author(s): Werner H. Jark, Diane Eichert, Elettra-Sincrotrone Trieste S.C.p.A. (Italy)
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Session 5:
Modeling and Specifications of Optics
Monday 29 August 2016
3:30 PM - 4:50 PM
Fiber-optic based in-situ atomic spectroscopy for manufacturing of x-ray optics
Paper 9962-14
Author(s): George A. Atanasoff, Christopher J. Metting, Hasso von Bredow, AccuStrata Inc. (United States)
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Modeling of surface metrology with state-of-the-art x-ray mirrors as a result of stochastic polishing process: recent developments
Paper 9962-15
Author(s): Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States); Yuri N. Tyurin, Anastasia Y. Tyurina, Second Star Algonumerix, LLC (United States); Gary Centers, Lawrence Berkeley National Lab. (United States)
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Ray-tracing as a tool for efficient specification of beamline optical components
Paper 9962-16
Author(s): Pablo Pedreira Conchado, Igors Sics, Ibraheem Yousef, Marta Llonch, Jon Ladrera, ALBA Synchrotron (Spain); Llibert Ribó, Carles Colldelram, CELLS - ALBA (Spain); Josep Nicolas, ALBA Synchrotron (Spain)
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Deformation of multilayers and optical surfaces in EUV adaptive optics
Paper 9962-17
Author(s): Benjamin J. Wylie-van Eerd, Huiyu Yuan, Evert Houwman, Oleksandr Antonov, Eric Louis, Andrey E. Yakshin, Guus J. H. M. Rijnders, Fred Bijkerk, Univ. Twente (Netherlands)
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Session PMon:
Monday 29 August 2016
5:30 PM - 7:30 PM

Conference attendees are invited to attend the poster session on Monday evening. Come view the posters, enjoy light refreshments, ask questions, and network with colleagues in your field. Authors of poster papers will be present to answer questions concerning their papers. Attendees are required to wear their conference registration badges to the poster sessions. Poster authors, view poster presentation guidelines at
Imprinting a focused x-ray laser beam to measure its full spatial characteristics
Paper 9962-18
Author(s): J. Chalupsky, P. Bohácek, Tomáš Burian, V. Hájková, Libor Juha, Institute of Physics of the ASCR, v.v.i. (Czech Republic); Vojtech Vozda, Institute of Physics of the ASCR, v.v.i. (Czech Republic), Charles Univ. in Prague (Czech Republic); Stefan P. Hau-Riege, Lawrence Livermore National Lab. (United States); Philip A. Heimann, Marc Messerschmidt, Stefan P. Moeller, Robert Nagler, Michael Rowen, William F. Schlotter, Michele L. Swiggers, Joshua J. Turner, Jacek Krzywinski, SLAC National Accelerator Lab. (United States)
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The influence of microstructure on the optical properties of beryllium compound refractive lenses in coherent transmission x-ray microscopy
Paper 9962-19
Author(s): Ivan Lyatun, Immanuel Kant Baltic Federal Univ. (Russian Federation)
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