Hotel Alimara
Barcelona, Spain
8 - 10 May 2017
Conference 10246
Smart Sensors, Actuators, and MEMS VIII
Monday - Wednesday 8 - 10 May 2017
Conference
Committee
show | hide
Conference Chair
  • Luis Fonseca, Ctr. Nacional de Microelectrónica, CSIC (Spain)

Conference Co-Chairs
  • Mika Prunnila, VTT Technical Research Ctr. of Finland Ltd. (Finland)
  • Erwin Peiner, Technische Univ. Braunschweig (Germany)

Program Committee
Program Committee continued...
  • Nathan M. Jackson, Tyndall National Institute (Ireland)
  • Konrad Kapser, Infineon Technologies AG (Germany)
  • Robert J. Lad, Univ. of Maine (United States)
  • Jeong-Bong Lee, The Univ. of Texas at Dallas (United States)
  • Elie Lefeuvre, Univ. Paris-Sud 11 (France)
  • Gemma Garcia Mandayo, CEIT-IK4 (Spain)
  • Fernando Martinez, IKERLAN, IK4 (Spain)
  • Dean P. Neikirk, The Univ. of Texas at Austin (United States)
  • Patrick Pons, Lab. d'Analyse et d'Architecture des Systèmes, CNRS (France)
  • Michele Pozzi, Newcastle Univ. (United Kingdom)
  • Gabriele Schrag, Technische Univ. München (Germany)
  • Andreas Schütze, Univ. des Saarlandes (Germany)
  • Ashwin Seshia, Univ. Cambridge (United Kingdom)
  • Pietro Siciliano, Istituto per la Microelettronica e Microsistemi (Italy), Consiglio Nazionale delle Ricerche (Italy)
  • Gabriel Vanko, Slovak Academy of Sciences (Slovakia)
  • Jürgen Wöllenstein, Fraunhofer-Institut für Physikalische Messtechnik (Germany)

Monday 8 May Show All Abstracts
Session Plen:
Monday Plenary Session
Monday 8 May 2017
8:40 AM - 10:00 AM

8:40:
Opening Remarks: Ulrich Schmid, Technische Univ. Wien (Austria)

8:50:
Welcome: Carles Cané, Ctr. Nacional de Microelectronica (Spain)
Smart integrated microsystems: the energy efficiency challenge (Plenary Presentation)
Paper 10248-501
Author(s): Luca Benini, Univ. degli Studi di Bologna (Italy)
Show Abstract
Session 1:
Modeling and Simulation I
Monday 8 May 2017
10:30 AM - 12:10 PM
Multiscale numerical study on ferroelectric nonlinear response of PZT thin films
Paper 10246-1
Author(s): Hiroki Wakabayashi, Osaka Institute of Technology (Japan), Tokai Univ. (Japan); Yasutomo Uetsuji, Osaka Institute of Technology (Japan); Kazuyoshi Tsuchiya, Tokai Univ. (Japan)
Show Abstract
Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonators
Paper 10246-2
Author(s): Víctor Ruiz-Díez, Javier Toledo Serrano, Jorge Hernando-García, Univ. de Castilla-La Mancha (Spain); Georg Pfusterschmied, Ulrich Schmid, Technische Univ. Wien (Austria); José Luis Sánchez-Rojas Aldavero, Univ. de Castilla-La Mancha (Spain)
Show Abstract
Optimization of a Piezo-fiber scanning architecture
Paper 10246-3
Author(s): Ramin Khayatzadeh, Fehmi Civitci, Onur Ferhanoglu, Istanbul Technical Univ. (Turkey)
Show Abstract
Optimal design of a microgripper-type actuator
Paper 10246-4
Author(s): David Ruiz, Alex Díaz, Univ. de Castilla-La Mancha (Spain); Ole Sigmund, Technical Univ. of Denmark (Denmark); José Carlos Bellido, Alberto Donoso, José Luis Sánchez-Rojas Aldavero, Univ. de Castilla-La Mancha (Spain)
Show Abstract
Topologically optimised flexure hinge based XY stage
Paper 10246-5
Author(s): Adil Han Orta, Bogazici University (Turkey); Evren Samur, Cetin Yilmaz, Bogaziçi Univ. (Turkey)
Show Abstract
Lunch Break 12:10 PM - 1:40 PM
Session 2:
Modeling and Simulation II
Monday 8 May 2017
1:40 PM - 3:00 PM
  • Session Chair:
  • Jacopo Iannacci, Fondazione Bruno Kessler (Italy)
Modelling high signal to noise ratio in a novel silicon MEMS microphone with comb readout
Paper 10246-6
Author(s): Johannes Manz, Technische Univ. München (Germany); Alfons Dehé, Infineon Technologies AG (Germany); Gabriele Schrag, Technische Univ. München (Germany)
Show Abstract
Multiphysical simulation of a surface acoustic wave gyro sensing element
Paper 10246-7
Author(s): Alexander S. Kukaev, Dmitry P. Lukyanov, Sergey Y. Shevchenko, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)
Show Abstract
An FE model of a cellular polypropylene: exploring mechanical properties
Paper 10246-8
Author(s): Pavlos Sgardelis, Michele Pozzi, Newcastle Univ. (United Kingdom)
Show Abstract
Efficient fluid transport by a bionically inspired micro-flapper: fluidic investigations using fully coupled finite element simulation
Paper 10246-9
Author(s): Gabriele Schrag, Regine Behlert, Gerhard Wachutka, Technische Univ. München (Germany)
Show Abstract
Session 3:
Chemical and Biochemical Sensors I
Monday 8 May 2017
3:30 PM - 4:30 PM
  • Session Chair:
  • Mika Prunnila, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Development of a lab-on-chip electrochemical immunosensor array for detection of Polycyclic Aromatic Hydrocarbons (PAH) in the environmental
Paper 10246-10
Author(s): Shifa Jameel A. Felemban, Patricia Vazquez, Tyndall National Institute (Ireland); Eric Moore, Tyndall National Institute (Ireland), Univ. College Cork (Ireland)
Show Abstract
Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever
Paper 10246-11
Author(s): Jiushuai Xu, Maik Bertke, Alaaeldin Gad, Hao Zhou, Hutomo Suryo Wasisto, Erwin Peiner, Technische Univ. Braunschweig (Germany)
Show Abstract
MEMS-based multi-array hydrogen sulfide detection employing a phase transition
Paper 10246-12
Author(s): Benedikt Bierer, Cem Dinc, Haitao Gao, Univ. of Freiburg (Germany); Jürgen Wöllenstein, Univ. of Freiburg (Germany), Fraunhofer-Institut für Physikalische Messtechnik (Germany); Stefan Palzer, Univ. of Freiburg (Germany)
Show Abstract
Session 4:
Chemical and Biochemical Sensors II
Monday 8 May 2017
4:30 PM - 5:50 PM
Direct measurement for organic solvents diffusion using ultra-sensitive optical resonator
Paper 10246-13
Author(s): Amir R. Ali, Catherine Elias, The German Univ. in Cairo (Egypt)
Show Abstract
Inkjet-printed dissolved oxygen and pH sensors on flexible plastic substrates
Paper 10246-14
Author(s): Ana Moya, Miguel Zea, Instituto de Microelectrónica de Barcelona (Spain); Enrico Sowade, Technische Univ. Chemnitz (Germany); Rosa Villa, Eloi Ramon, Instituto de Microelectrónica de Barcelona (Spain); Reinhard R. Baumann, Technische Univ. Chemnitz (Germany); Gemma Gabriel, Instituto de Microelectrónica de Barcelona (Spain)
Show Abstract
Wax microfluidics light-addressable valve with multiple actuation
Paper 10246-15
Author(s): Maria Diaz-Gonzalez, Gerard Boix, Cesar Fernandez-Sanchez, Antonio Baldi, Instituto de Microelectrónica de Barcelona (Spain), Consejo Superior de Investigaciones Científicas (Spain)
Show Abstract
Development of biosensors for non-invasive measurements of heart failure biomarkers in saliva
Paper 10246-16
Author(s): Albert Alcacer, Angelos Streklas, Ctr. Nacional de Microelectrónica (Spain), Consejo Superior de Investigaciones Científicas (Spain); Abdoullatif Baraket, Nadia Zine, Abdelhamid Errachid, Univ. Claude Bernard Lyon 1 (France); Joan Bausells, Ctr. Nacional de Microelectrónica (Spain), Consejo Superior de Investigaciones Científicas (Spain)
Show Abstract
Tuesday 9 May Show All Abstracts
Session Plen:
Tuesday Plenary Session
Tuesday 9 May 2017
9:00 AM - 10:00 AM
MEMS microphone innovations towards high signal to noise ratios (Plenary Presentation)
Paper 10246-500
Author(s): Alfons Dehé, Infineon Technologies AG (Germany)
Show Abstract
Session 5:
Physical Sensors I
Tuesday 9 May 2017
10:30 AM - 11:50 AM
  • Session Chair:
  • Robert J. Lad, The Univ. of Maine (United States)
MEMS direction finding acoustic sensor
Paper 10246-17
Author(s): Gamani Karunasiri, Fabio Alves, William Swan, Naval Postgraduate School (United States)
Show Abstract
A multi-functional MEMS-SPM for quantitative characterisation of nano-objects
Paper 10246-18
Author(s): Zhi Li, Sai Gao, Uwe Brand, Physikalisch-Technische Bundesanstalt (Germany)
Show Abstract
Asymmetric resonance response analysis of a thermally excited silicon microcantilever for mass-sensitive nanoparticle detection
Paper 10246-19
Author(s): Maik Bertke, Gerry Hamdana, Wenze Wu, Markus Marks, Hutomo Suryo Wasisto, Erwin Peiner, Technische Univ. Braunschweig (Germany)
Show Abstract
Thermoelectric bolometers based on ultra-thin highly doped silicon membranes
Paper 10246-20
Author(s): Aapo Varpula, Andrey V. Timofeev, Andrey Shchepetov, Kestutis Grigoras, Jouni Ahopelto, Mika Prunnila, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Show Abstract
Lunch Break 11:50 AM - 1:10 PM
Session 6:
Physical Sensors II
Tuesday 9 May 2017
1:10 PM - 2:30 PM
  • Session Chair:
  • Sören Fricke, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Highly tensioned SiN Membrane with low recoil losses for quantum optics
Paper 10246-21
Author(s): Antonio L. Borrielli, Istituto dei Materiali per l'Elettronica ed il Magnetismo (Italy); Enrico Serra, Trento Institute for Fundamental Physics and Applications (Italy); Michele Bonaldi, Istituto dei Materiali per l'Elettronica ed il Magnetismo (Italy); Lorenzo Marconi, Istituto Nazionale di Ottica (Italy); Francesco Marin, Univ. degli Studi di Firenze (Italy); Bruno Morana, Technische Univ. Delft (Netherlands); Antonio Pontin, Univ. degli Studi di Firenze (Italy); Francesco Marino, Istituto Nazionale di Ottica (Italy); Gregory Pandraud, Technische Univ. Delft (Netherlands); Giovanni A. Prodi, Univ. degli Studi di Trento (Italy); Pasqualina M. Sarro, Technische Univ. Delft (Netherlands)
Show Abstract
Oscillator circuit for monitoring the gas damping effect of piezoelectric microresonators
Paper 10246-22
Author(s): Javier Toledo Serrano, Victor Ruiz-Díez, Univ. de Castilla-La Mancha (Spain); Patrick Schwarz, Helmut Seidel, Univ. des Saarlandes (Germany); José Luis Sánchez-Rojas Aldavero, Univ. de Castilla-La Mancha (Spain)
Show Abstract
Comparative assessment of PVDF and PVDF-TrFE piezoelectric polymers for flexible actuators applications
Paper 10246-23
Author(s): Graciela Gutiérrez-Sánchez, Jorge Hernando-García, Óscar Dura, Marco Antonio López de la Torre, José Luis Sánchez-Rojas Aldavero, Univ. de Castilla-La Mancha (Spain)
Show Abstract
Thin film system with integrated load and temperature sensors for the technical application in deep drawing process
Paper 10246-24
Author(s): Saskia N. Biehl, Fraunhofer-Institut für Schicht- und Oberflächentechnik (Germany)
Show Abstract
Session PTue:
Poster Session
Tuesday 9 May 2017
2:30 PM - 4:30 PM

Conference attendees are invited to attend the Poster Session on Tuesday afternoon. Come view posters, enjoy light refreshments, ask questions, and network with colleagues in your field. Authors of poster papers will be present to answer questions concerning their papers. Attendees are required to wear their conference badges to the poster session.
Anti-collision RFID system using passive SAW tags
Paper 10246-40
Author(s): Alexander Sorokin, Alexander P. Shepeta, Saint-Petersburg State Univ. of Aerospace Instrumentation (Russian Federation)
Show Abstract
Mini- and microgenerators applicable in the MEMS technology
Paper 10246-41
Author(s): Pavel J. Fiala, Zoltán Szabó, Petr Marcon, Zdenek Roubal, Brno Univ. of Technology (Czech Republic)
Show Abstract
Design and development of microfluidic pH sensor created using RF sputtering technique
Paper 10246-42
Author(s): Ganesh Kumar Mani, Asuka Saito, Kazuyoshi Tsuchiya, Yutaka Yasoda, Tokai Univ. (Japan)
Show Abstract
Modelling the microstructure of surface by applying BRDF function
Paper 10246-43
Author(s): Kamil Plachta, Wroclaw Univ. of Science and Technology (Poland)
Show Abstract
Actuation control of PiezoMEMS a biomimetic jellyfish robot
Paper 10246-44
Author(s): Alvaro Alejandre, Oskar Z. Olszewski, Nathan M. Jackson, Tyndall National Institute (Ireland)
Show Abstract
Stream cipher with a MEMS-based seed generator
Paper 10246-45
Author(s): Miguel Garcia-Bosque, Adrian Perez, Carlos Sánchez-Azqueta, Santiago Celma Pueyo, Guillermo Royo, Univ. de Zaragoza (Spain)
Show Abstract
Analyses of electromagnetic and piezoelectric systems for efficient vibration energy harvesting
Paper 10246-46
Author(s): Zdenek Hadas, Jan Smilek, Ondrej Rubes, Brno Univ. of Technology (Czech Republic)
Show Abstract
Gold/polypyrrole nanorods for gas sensing application
Paper 10246-47
Author(s): Milena Setka, Jana Drbohlavová, Brno Univ. of Technology (Czech Republic); Eduard Llobet, Univ. Rovira i Virgili (Spain)
Show Abstract
Four-segment Piezo-based micropump
Paper 10246-48
Author(s): Rakesh K. Haldkar, Tanuja Sheorey, Vijay K. Gupta, PDPM Indian Institute of Information Technology, Design & Manufacturing Jabalpur (India)
Show Abstract
Computational model and simulation for the whispering gallery modes inside micro-optical cavity
Paper 10246-49
Author(s): Amir R. Ali, The German Univ. in Cairo (Egypt), Southern Methodist Univ. (United States); Abanoub Erian, The German Univ. in Cairo (Egypt); Kirelloss Shokry, The German Univ. in Cairo (Egypt), Univ. Twente (Netherlands)
Show Abstract
Thermal analysis of magnetic trapping with alternating magnetic fields
Paper 10246-50
Author(s): Vania Silverio, Raju Kumar, INESC MN (Portugal); Miguel Amaral, João Gaspar, International Iberian Nanotechnology Lab. (Portugal); Susana Cardoso, INESC MN (Portugal); Paulo P. Freitas, INESC MN (Portugal), International Iberian Nanotechnology Lab. (Portugal)
Show Abstract
Influence of binding material of PZT coating on microresonator's electrical and mechanical properties
Paper 10246-51
Author(s): Giedrius Janušas, Alfredas Brunius, Elingas Cekas, Asta Guobiene, Arvydas Palevicius, Kaunas Univ. of Technology (Lithuania)
Show Abstract
Colorimetric sensor for bad odor detection using automated color correction
Paper 10246-52
Author(s): Katrin Schmitt, Karina Tarantik, Carolin Pannek, Fraunhofer-Institut für Physikalische Messtechnik (Germany); Ismael Benito-Altamirano, Olga Casals, Cristian Fabrega, Albert Romano-Rodriguez, Univ. de Barcelona (Spain); Jürgen Wöllenstein, Univ. of Freiburg (Germany), Fraunhofer-Institut für Physikalische Messtechnik (Germany); J. Daniel Prades, Univ. de Barcelona (Spain)
Show Abstract
Temperature simulation at ZnO surface processed by laser interference lithography
Paper 10246-53
Author(s): Laura Parellada-Monreal, Miguel Martínez-Calderon, Irene Castro-Hurtado, Ainara Rodríguez, Santiago M. Olaizola, Mikel Gómez-Aranzadi, Isabel Ayerdi, Enrique Castaño, Gemma García Mandayo, CEIT-IK4 (Spain)
Show Abstract
Metal wafer bonding for microelectronics and MEMS devices
Paper 10246-54
Author(s): Bernhard Rebhan, Viorel Dragoi, EV Group (Austria)
Show Abstract
Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators
Paper 10246-55
Author(s): Javier Toledo Serrano, Victor Ruiz-Díez, Univ. de Castilla-La Mancha (Spain); Georg Pfusterschmied, Ulrich Schmid, Technische Univ. Wien (Austria); José Luis Sánchez-Rojas Aldavero, Univ. de Castilla-La Mancha (Spain)
Show Abstract
Radio link design framework for WSN deployment and performance prediction
Paper 10246-56
Author(s): Sergio Saponara, Filippo Giannetti, Univ. di Pisa (Italy)
Show Abstract
User centered integration of Internet of Things devices
Paper 10246-57
Author(s): Roberto Manione, Media on Line (Italy)
Show Abstract
Session 7:
Materials and Processes
Tuesday 9 May 2017
4:30 PM - 5:50 PM
  • Session Chair:
  • Erwin Peiner, Technische Univ. Braunschweig (Germany)
Low-cost nanomechanical surfaces stress based sensors fabricated by hybrid materials
Paper 10246-25
Author(s): Pedro Fernando Escudero Villa, Jose Yeste Lozano, Rosa Villa, Mar Alvarez, Instituto de Microelectrónica de Barcelona (Spain)
Show Abstract
Micro- and nanostructured membranes used in AlGaN/GaN: MEMS and pressure sensors for microfluidic applications in bioengineering and monitoring
Paper 10246-26
Author(s): Johann Zehetner, Stephan Kasemann, FH Vorarlberg (Austria); Gabriel Vanko, Jaroslav Dzuba, Tibor Lalinský, Institute of Electrical Engineering SAS (Slovakia); Sylvia Nürnberger, Medizinische Univ. Wien (Austria)
Show Abstract
Zirconium diboride thin films for use in high temperature sensors and MEMS devices
Paper 10246-27
Author(s): Robert J. Lad, David M. Stewart, George P. Bernhardt, The Univ. of Maine (United States)
Show Abstract
FT-IR analysis of high temperature annealing effects in a SiC:H thin films
Paper 10246-28
Author(s): Tobias Frischmuth, Michael Schneider, Technische Univ. Wien (Austria); Thomas Grille, Infineon Technologies Austria AG (Austria); Ulrich Schmid, Technische Univ. Wien (Austria)
Show Abstract
Wednesday 10 May Show All Abstracts
Session Plen:
Wednesday Plenary Session
Wednesday 10 May 2017
9:00 AM - 10:00 AM
Graphene technologies for bioelectronics and neuroprosthetics (Plenary Presentation)
Paper 10248-500
Author(s): Jose A. Garrido, Institut Català de Nanociència i Nanotecnologia (ICN2) (Spain)
Show Abstract
Session 8:
Energy Devices I
Wednesday 10 May 2017
10:30 AM - 12:10 PM
  • Session Chair:
  • Gemma García Mandayo, CEIT-IK4 (Spain)
Micro solid oxide fuel cells: a new generation of micro-power sources for portable applications (Invited Paper)
Paper 10246-29
Author(s): Albert Tarancón, Institut de Recerca en Energia de Catalunya (Spain)
Show Abstract
Alkaline fuel cell with nitride membrane
Paper 10246-30
Author(s): Shen-Huei Sun, Institut für Mikroelektronik Stuttgart (Germany); Moritz Pilaski, Jens Wartmann, ZBT GmbH (Germany); Florian Letzkus, Institut für Mikroelektronik Stuttgart (Germany); Benedikt Funke, Georg Dura, Angelika Heinzel, ZBT GmbH (Germany)
Show Abstract
Parameter identification from frequency response of MEMS energy harvesters
Paper 10246-31
Author(s): Binh D. Truong, Phu C. Le, Einar Halvorsen, Univ. College of Southeast Norway (Norway)
Show Abstract
Powering a leadless pacemaker using a PiezoMEMS energy harvester
Paper 10246-32
Author(s): Nathan M. Jackson, Cian O'Murchu, Alan Mathewson, Oskar Z. Olszewski, Tyndall National Institute (Ireland)
Show Abstract
Lunch Break 12:10 PM - 1:40 PM
Session 9:
Energy Devices II
Wednesday 10 May 2017
1:40 PM - 3:00 PM
Designing, modelling, and testing of vibration energy harvester with nonlinear stiffness
Paper 10246-33
Author(s): Ondrej Rubes, Zdenek Hadas, Brno Univ. of Technology (Czech Republic)
Show Abstract
Comparison of methods for static charge energy harvesting on aircrafts
Paper 10246-34
Author(s): Michail E. Kiziroglou, Alexander Technological Educational Institute of Thessaloniki (Greece); Thomas Becker, Airbus Group Innovations (Germany); Eric M. Yeatman, Imperial College London (United Kingdom); James W. Evans, Paul K. Wright, Univ. of California, Berkeley (United States)
Show Abstract
Improved thermal and electrical design for an all-Si thermoelectric micropower source
Paper 10246-35
Author(s): Inci Donmez, Marc Salleras, Carlos A. Calaza Cabanas, Institut de Microelectrònica de Barcelona (Spain); Gerard Gadea, Alex Morata, Albert Tarancón, Institut de Recerca en Energia de Catalunya (Spain); Luis Fonseca, Institut de Microelectrònica de Barcelona (Spain)
Show Abstract
Integrated TiN coated porous silicon supercapacitor with increased capacitance per foot print
Paper 10246-36
Author(s): Kestutis Grigoras, Leif Grönberg, Jouni Ahopelto, Mika Prunnila, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Show Abstract
Session 10:
Interfacing and System Integration
Wednesday 10 May 2017
3:30 PM - 4:30 PM
  • Session Chair:
  • Luis Fonseca, Ctr. Nacional de Microelectrónica (Spain)
A programmable differential capacitance to voltage converter for MEMS accelerometers
Paper 10246-37
Author(s): Guillermo Royo, Univ. de Zaragoza (Spain); Cecilia Gimeno Gazca, Univ. Catholique de Louvain (Belgium); Carlos Sánchez-Azqueta, Concepción Aldea, Santiago Celma Pueyo, Univ. de Zaragoza (Spain)
Show Abstract
Robust design of an inkjet-printed capacitive sensor for position tracking of a MOEMS-mirror in a Michelson interferometer setup
Paper 10246-38
Author(s): Lisa-Marie Faller, Hubert Zangl, Alpen-Adria-Univ. Klagenfurt (Austria)
Show Abstract
Universal and inductorless DC/DC converter for multi-output power supplies in sensor and actuator networks
Paper 10246-39
Author(s): Sergio Saponara, Gabriele Ciarpi, Univ. di Pisa (Italy)
Show Abstract
Back to Top