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SPIE Advanced Lithography 22 - 27 February 2009
San Jose Convention Center and San Jose Marriott
San Jose, California, USA

Plan to attend SPIE Advanced Lithography 2009


SPIE Advanced Lithography is the internationally recognized forum for reporting state-of-the-art research and development in optical lithography, resists, metrology, EUV, immersion, double patterning, DFM, and imprint lithography.

See presentations on:

  • Alternative Lithographic Technologies
  • Metrology, Inspection, and Process Control for Microlithography
  • Advances in Resist Materials and Processing Technology
  • Optical Microlithography
  • Design for Manufacturability through Design-Process Integration
See the full event program online or download the Advance Program (PDF).

Register Today and save $100 over onsite pricing

See plenary presentations from top experts:
Lisa T. Su, Senior Vice President and Chief Technology Officer for Freescale Semiconductor, Inc.
Gilad Almogy, Senior Vice President and General Manager for the Display and Thin Film Solar Products Business Group, Applied Materials, Inc.
Bernard S. Meyerson, Vice President for Strategic Alliances and Chief Technology Officer, IBM Systems and Technology Group
Collaborate with your colleagues
Over 4,000 colleagues from different disciplines and locations collaborate to move their fields forward.

Add to Your Skills with Courses + Training
Extend your education with a course from globally recognized experts. Put yourself and your team in control of the latest technology and techniques.


Critical information for all visitors from outside the United States
Effective January 12, 2009, travelers from Visa Waiver Program countries need to obtain an electronic travel authorization prior to boarding. This includes travelers from the UK, Germany, Japan, and many other countries.

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