22 - 27 February 2009 San Jose Convention Center and San Jose Marriott San Jose,
California,
USA
Plan to attend SPIE Advanced Lithography 2009
SPIE Advanced Lithography is the internationally recognized forum for reporting state-of-the-art research and development in optical lithography, resists, metrology, EUV, immersion, double patterning, DFM, and imprint lithography.
See presentations on:
Alternative Lithographic Technologies
Metrology, Inspection, and Process Control for Microlithography
Advances in Resist Materials and Processing Technology
Optical Microlithography
Design for Manufacturability through Design-Process Integration
Lisa T. Su, Senior Vice President and Chief Technology Officer for Freescale Semiconductor, Inc.
Gilad Almogy, Senior Vice President and General Manager for the Display and Thin Film Solar Products Business Group, Applied Materials, Inc.
Bernard S. Meyerson, Vice President for Strategic Alliances and Chief Technology Officer, IBM Systems and Technology Group
Collaborate with your colleagues Over 4,000 colleagues from different disciplines and locations collaborate to move their fields forward.
Add to Your Skills with Courses + Training Extend your education with a course from globally recognized experts. Put yourself and your team in control of the latest technology and techniques.
Critical information for all visitors from outside the United States Effective January 12, 2009, travelers from Visa Waiver Program countries need to obtain an electronic travel authorization prior to boarding. This includes travelers from the UK, Germany, Japan, and many other countries.