23 - 27 February 2025
San Jose, California, US
SPIE Advanced Lithography + Patterning in San Jose, California SPIE Advanced Lithography + Patterning in San Jose, California

SPIE Advanced Lithography + Patterning

The event for emerging technology in the semiconductor industry

Attend to hear research, challenges, and breakthroughs as you gather with colleagues in San Jose

Join other leading researchers who are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications.
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Notable speakers from around the globe: meet the plenary speakers

Explore six great conferences

  • Optical and EUV Nanolithography
  • DTCO and Computational Patterning
  • Metrology, Inspection, and Process Control
  • Novel Patterning Technologies
  • Advances in Patterning Materials and Processes
  • Advanced Etch Technology and Process Integration for Nanopatterning

Five days of exciting content and connecting with your community

  • Plenary talks
  • Technical presentations
  • Networking sessions
  • Course offerings
  • Exhibition

Presenter at SPIE Advanced Lithography + Patterning

Add a course to your conference experience

Choose from a selection of highly valuable topics

Advance your career and expand your skill set with instructional opportunities. Several courses will be available in San Jose.

Attendees of SPIE Advanced Lithography + Patterning take a course

Exhibition at Advanced Lithography + Patterning

Connect with the semiconductor community

The exhibition at Advanced Lithography + Patterning is where people gather to collaborate and get business done. Find these technology solutions and more:
• Photoresist, EUV, and other specialty materials
• E-beam lithography systems
• Precision cleaning, contamination, transport support materials
• Wafer treatments and substrates

Attendees of SPIE Advanced Lithography

Learn about career opportunities

Watch a webinar recording from the semiconductor lithography community

Check out this webinar recording covering the basics of semiconductor lithography and available careers in the field. Opportunities for students to apply for full funding to attend the event in Feburary are also included in the discussion.

Watch to learn more!

Stay involved

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