Advanced Lithography 2011
Full-text papers on CD-ROM from all 6 Proceedings volumes. PC, Macintosh, and Unix compatible.
(Includes Vols. 7969-7974),
Order No. CDS426 • Est. pub. April 2011
Meeting attendee: $135
Nonattendee member price: $475
Nonattendee nonmember price: $620
Printed Proceedings: Editor-reviewed papers from individual conferences are printed within six weeks of the meeting.
