Conferences & Exhibitions Calendar
Print PageEmail Page
SPIE Advanced Lithography 12 - 16 February 2012
San Jose Convention Center and San Jose Marriott
San Jose, California, USA

Courses

Take advantage of the unique opportunity to learn directly from industry legends and other experts in lithography design and manufacturing.
New courses for 2012 include Directed Self-Assembly (DSA), metrology with Atomic Force Microscopy (AFM), and Practical Modeling and Computational Lithography.

Online course registration is now closed, but onsite registration is available.

(Note: Prices for courses increased $50 on Jan. 28. The increase is not reflected in the pricing on this page, but will be when you register.)

Date: 12 February 2012
Time: 1:30 PM - 5:30 PM
Location: San Jose, United States
Course Level: Introductory
Instructor: Hong Xiao, KLA-Tencor Corp. (United States)
$300.00 Members  |  $355.00 Non-members
Date: 12 February 2012
Time: 8:30 AM - 5:30 PM
Location: San Jose, United States
Course Level: Introductory
Instructor: Murrae J. Bowden, EMP Consultants (United States); C. Grant Willson, The Univ. of Texas at Austin (United States)
$525.00 Members  |  $635.00 Non-members
Date: 16 February 2012
Time: 8:30 AM - 5:30 PM
Location: San Jose, United States
Course Level: Advanced
Instructor: C. Grant Willson, Univ. of Texas/Austin (United States)
$525.00 Members  |  $635.00 Non-members
Date: 13 February 2012
Time: 1:30 PM - 5:30 PM
Location: San Jose, United States
Course Level: Introductory
Instructor: Chi-Min (Chi) Yuan, Freescale Semiconductor, Inc. (United States)
$300.00 Members  |  $355.00 Non-members
Date: 12 February 2012
Time: 8:30 AM - 5:30 PM
Location: San Jose, United States
Course Level: Intermediate
Instructor: Chris A. Mack, Consultant (United States)
$575.00 Members  |  $685.00 Non-members
Date: 16 February 2012
Time: 8:30 AM - 12:30 PM
Location: San Jose, United States
Course Level: Introductory
Instructor: Ralph R. Dammel, AZ Electronic Materials USA Corp. (United States)
$300.00 Members  |  $355.00 Non-members
Date: 14 February 2012
Time: 8:30 AM - 5:30 PM
Location: San Jose, United States
Course Level: Intermediate
Instructor: Mircea V. Dusa, ASML US, Inc. (United States); Stephen D. Hsu, Brion Technologies, Inc. (United States)
$525.00 Members  |  $635.00 Non-members
Date: 12 February 2012
Time: 8:30 AM - 5:30 PM
Location: San Jose, United States
Course Level: Intermediate
Instructor: Vivek Bakshi, EUV Litho, Inc. (United States); Jinho Ahn, Hanyang Univ. (South Korea); Patrick P. Naulleau, Lawrence Berkeley National Lab. (United States)
$755.00 Members  |  $865.00 Non-members
Date: 12 February 2012
Time: 8:30 AM - 5:30 PM
Location: San Jose, United States
Course Level: Introductory
Instructor: Qinghuang Lin, IBM Thomas J. Watson Research Ctr. (United States); Thorsten B. Lill, Applied Materials, Inc. (United States)
$525.00 Members  |  $635.00 Non-members
Date: 12 February 2012
Time: 8:30 AM - 12:30 PM
Location: San Jose, United States
Course Level: Introductory
Instructor: Vladimir A. Ukraintsev, Nanometrology International, Inc. (United States)
$300.00 Members  |  $355.00 Non-members
Date: 12 February 2012
Time: 8:30 AM - 5:30 PM
Location: San Jose, United States
Course Level: Intermediate
Instructor: Kafai Lai, IBM Corp. (United States)
$525.00 Members  |  $635.00 Non-members
Date: 12 February 2012
Time: 1:30 PM - 5:30 PM
Location: San Jose, United States
Course Level: Introductory
Instructor: Juan J. de Pablo, Paul F. Nealey, Univ. of Wisconsin-Madison (United States); Ricardo Ruiz, Hitachi Global Storage Technologies, Inc. (United States)
$300.00 Members  |  $355.00 Non-members
Search Program
To refine your search, check all that apply
 Oral & Poster Presentations
 Special Forums & Events
 Courses
 Exhibitors & Products
View My Schedule

Important Author Dates

Late submissions may be accepted at the conference chairs discretion

Author Notification:
26 October 2011

Manuscripts Due:
16 January 2012


Browse Advanced Lithography 2010 papers


Sign Up for Email Updates
Receive email updates on SPIE Advanced Lithography.